The AccuScribe SS40EL is the successor to New Wave Research's already acclaimed laser-based wafer scribing systems (SS40). The AccuScribe tool is a field-proven, cost-effective scribing laser system. The AccuScribe produces consistently clean, die scribed lines at a uniform depth resulting in superior die singulation yield for LED manufacturers. Similar to its predecessor, the AccuScribe SS40EL is ideal for the 24/7 production environment. It accommodates industry-standard blue film expansion frames, performs both full and partial wafer scribing, and features an automatic edge detection capability.
A new focus position mechanism has been added along with an accurate X-Y stage to ensure consistent laser focus and scribe depth during the scribing operation. The SS40EL system also offers a backside alignment option which allows users to scribe non-transparent wafers.
Please contact New Wave Research Sales Representative for more information at NWR_lasers@esi.com.
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